The cathode material plays a fundamental role in the performance of lithium-ion batteries. These materials are responsible for the accumulation of lithium ions during the cycling process. A wide range of substances has been explored for cathode applications, with each offering unique attributes. Some common examples include lithium cobalt oxide (L

Sputtering is a widespread technique utilized in the fabrication of advanced thin films. Titanium (Ti) sputtering, namely, has emerged as a leading method due to its ability to deposit high-quality Ti thin films with accurate thickness and composition. The process involves bombarding a Ti target with energetic ions, ejecting atoms that then deposit